Double polishing head

Details Double polishing head Double polishing head

1999-04-12

2000-12-05

Banks, Derris H.

Abrading

Abrading process

Combined abrading

451 63, 451287, B24B 100

Patent

active

06155913&

ABSTRACT:
Double or multiple unit polishing heads are used thereby negating the negative effects that irregularities in the surface of the polishing pad have on the polishing results obtained. Adjacent double or multiple unit polishing heads rotate in opposite directions thereby eliminating the effects of microscopic directions in the surface of the polishing pads.

REFERENCES:
patent: 4726150 (1988-02-01), Nishio et al.
patent: 5230184 (1993-07-01), Bukhman
patent: 5575707 (1996-11-01), Talieh et al.
patent: 5690542 (1997-11-01), Ikemoto
patent: 5733175 (1998-03-01), Leach
patent: 5800253 (1998-09-01), Ikemoto
patent: 5816891 (1998-10-01), Woo

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