Double pinned sensor utilizing a tensile film

Details Double pinned sensor utilizing a tensile film Double pinned sensor utilizing a tensile film

1992-06-17

1993-09-07

Chilcot, Jr., Richard E.

Measuring and testing

Fluid pressure gauge

Diaphragm

73724, G01L 912

Patent

active

052418642

ABSTRACT:
A double pinned micromachined sensor (11) which utilizes a laminated film (27) having overall tensile strength formed on top of a silicon substrate (16). The laminated film (27) comprises a layer of silicon nitride (18) encapsulated by two layers of polysilicon (19, 21), the silicon nitride (18) providing overall tension for the laminated film. The laminated film (27) is supported above the silicon substrate by support posts (17) and is selectively etched to form a sensor (11, 13).

REFERENCES:
patent: 5181156 (1993-01-01), Gutteridge et al.

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