Double-layer, polysilicon, two-phase, charge coupled device

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357 59, H01L 2978, H01L 2904

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active

040018610

ABSTRACT:
In a two-phase, charge-coupled device having alternate rows of internal and verlapping external electrodes, the external electrodes are fabricated from polysilicon instead of aluminum as heretofore, the internal electrodes also being of polysilicon. Sets of corresponding electrodes are then connected to a bus bar at each end, each bus bar for the same set of corresponding electrodes carrying the same phase, or clocking, signal.

REFERENCES:
patent: 3690968 (1972-09-01), Fa et al.
Appl. Phys. Lett. vol. 22, No. 6, Mar. 15, 1973, Shimizu et al.

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