Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-07-11
2006-07-11
Thompson, Timothy (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224200, C359S849000
Reexamination Certificate
active
07075699
ABSTRACT:
Disclosed is an actuator for a phase mirror array including a) a first support member extending perpendicularly from a surface of a mirror, b) a plurality of flexures engaging the first support member with the flexures being generally parallel to the surface of the mirror, c) second and third support members engaging opposing ends of the flexures, at least one of the second and third support members functioning as a first electrode, and d) a second electrode positioned in spaced parallel relationship with the flexures, whereby a voltage impressed across the first electrode and the second electrode causes displacement of the supported mirror on the support structure. The second electrode and one of the flexures can have undulating surfaces which mate in a comb relationship.
REFERENCES:
patent: 6360033 (2002-03-01), Lee et al.
patent: 6384952 (2002-05-01), Clark et al.
patent: 6791735 (2004-09-01), Stappaerts
Yijian Chen et al., “Modeling and Control of Nanomirrors for EUV Maskless Lithography,” Mar. 2000, Technical Proceedings International Conference on Microsystems, San Diego, CA.
Yijian Chen et al., “Switching of a Double-Comb Microactuator by Time-Lag Modulation and Electrical-Damping Control,” Nov. 15-20, 2000, MEMS Symposium, Orlando, FL.
Chen Yijian
Oldham William G.
Shroff Yashesh
Beyer Weaver & Thomas LLP
Choi William
The Regents of the University of California
Thompson Timothy
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