Double flexure support for stage drive coil

Details Double flexure support for stage drive coil Double flexure support for stage drive coil

1996-04-02

1999-08-24

Sircus, Brian

Electricity: motive power systems

Positional servo systems

With stabilizing features

318623, 318649, G05B 501

Patent

active

059428716

ABSTRACT:
In a stage for supporting an article, e.g. for a microlithographic system, the stage rides on a base and is driven in two orthogonal directions on the base along magnetic drive tracks by several drive coils riding in the drive tracks. Each drive coil, rather than being rigidly mounted to the stage, instead is connected to the stage by a tapered connecting member (beam). One end of each beam is connected to the stage by a double flexure assembly. The other end of each beam is connected to the drive coil by a similar double flexure assembly. Each double flexure assembly includes two orthogonal flexible members (stainless steel strips). Thus vibrations are reduced by use of this multiple flexible joints.

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