Double crucible Czochralski crystal growth apparatus

Details Double crucible Czochralski crystal growth apparatus Double crucible Czochralski crystal growth apparatus

1979-05-25

1982-10-05

Bernstein, Hiram

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

156DIG83, C30B 1512

Patent

active

043527841

ABSTRACT:
An apparatus useful for double crucible Czochralski crystal growth comprises an inner crucible fixed within an outer crucible wherein the inner crucible contains an extra volume or reservoir of semiconductor melt when flow of semiconductor melt from the outer crucible into the inner crucible through means interconnecting the crucibles ceases.

REFERENCES:
patent: 2892739 (1959-06-01), Rusler
patent: 3025191 (1962-03-01), Liverton
patent: 3198606 (1965-08-01), Lyons
patent: 3206286 (1965-09-01), Bennett et al.
patent: 3567397 (1971-03-01), O'Hara
patent: 3627499 (1971-12-01), Le Duc et al.
patent: 3637439 (1972-01-01), DeBie
patent: 3755011 (1973-08-01), Kleinknecht
Solid State Electronics, v. 5, pp. 131-134, 1960, Valcic.
Jl. of Applied Physics, v. 29, No. 8, 8/58, Liverton.

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