Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1998-01-28
1999-06-22
Epps, Georgia
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359247, 359295, 359318, 359290, G02B 2600, G02B 2608
Patent
active
059148047
ABSTRACT:
A mechanical modulator is provided that includes a conductive substrate and at least three multilayer mirrors disposed on the substrate. The mirrors are spaced apart from one another to define upper and lower optical cavities. The upper cavity is formed by an airgap having a variable thickness. The multilayer mirror located above the airgap includes a conductive membrane having an optically transparent portion and a flexible support for orienting the membrane in a first position. Under the action of a bias, the membrane moves to a second position, changing the air gap by a fraction of a wavelength of the optical signal, as measured in air. The change in position of the membrane from the first to the second position causes a change in the total reflectivity of the modulator from a minimum to a maximum value.
REFERENCES:
patent: 5500761 (1996-03-01), Goosen et al.
patent: 5589974 (1996-12-01), Goossen et al.
patent: 5654819 (1997-08-01), Goossen et al.
patent: 5808781 (1998-09-01), Arney et al.
Aratani et al., Proc. IEEE Microelectromech Workshop, Ft. Laud., Fla, Feb. 7-10, 1993 at 230-35.
Burke Margaret
Epps Georgia
Lucent Technologies Inc
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