Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1986-05-16
1988-06-14
Anderson, Bruce C.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250357, G01N 2300
Patent
active
047513934
ABSTRACT:
Apparatus for determining ion dose and ion dose uniformity of an ion beam scanned over a target plane in response to scanning signals includes a mask assembly for sensing the beam current at several different locations and providing a single beam current signal. The mask assembly includes a mask plate with sensing apertures and an annular Faraday cup aligned with the apertures for sensing beam current. The beam current signal is integrated over time to determine ion dose. A demultiplexer, in response to x and y scan signals, separates the beam current signal into separate signal components from each sensing aperture. Ion dose uniformity is determined by comparing the separate signal components, integrated over time, with an average value of the signal component.
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patent: 3689766 (1972-09-01), Freeman
patent: 3857090 (1974-12-01), Chick
patent: 4021675 (1977-05-01), Shifrim
patent: 4260897 (1981-04-01), Bakker et al.
patent: 4283631 (1981-08-01), Turner
patent: 4628209 (1986-12-01), Wittkower
Brick Robert V.
Corey, Jr. Philip D.
Lundquist Paul M.
Anderson Bruce C.
Cole Stanley Z.
Dooher Terrence E.
Fisher Gerald M.
Varian Associates Inc.
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