Dorsal substrate guarded ISFET sensor

Chemistry: electrical and wave energy – Apparatus – Electrolytic

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Details

204417, 257414, 257429, 257680, 438 49, 438126, G01N 2726, H01L 2714, H01L 2982, H01L 2984

Patent

active

058338241

ABSTRACT:
An Ion-sensitive Field Effect Transistor (ISFET) sensor for sensing ion activity of a solution includes a substrate and an ISFET semiconductor die. The substrate has front surface exposed to the solution, a back surface opposite to the front surface and aperture extending between the front and back surfaces. The ISPET semiconductor die has an ion-sensitive surface with a gate region. The ion-sensitive surface is mounted to the back surface such that the gate region is exposed to the solution through the aperture.

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