Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1994-06-28
1996-03-26
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356 285, 356349, G01B 902
Patent
active
055024661
ABSTRACT:
A position information detection apparatus includes a first detection system for radiating two collimated light beams onto an object to be measured at a predetermined crossing angle to form interference fringes at a predetermined interval, and detecting scattered light emanating from the object to be measured by the interference fringes at the predetermined interval, a second detection system for radiating two light beams onto the object to be measured at a predetermined crossing angle to form interference fringes having a gradient with each other in an opposing direction to the object to be measured, and detecting scattered light emanating from the object to be measured by the interference fringes having the gradient, and a detection unit for comparing output signals from the first and second detection systems, and detecting relative position information, along the opposing direction of the first and second detection systems, of the object to be measured.
REFERENCES:
patent: 4895447 (1990-01-01), Jarisch et al.
patent: 5327222 (1994-07-01), Takamiya et al.
Ashiwa Jun
Ishida Yasuhiko
Kadowaki Hidejiro
Kato Shigeki
Takamiya Makoto
Canon Kabushiki Kaisha
Kim Robert
Turner Samuel A.
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