Dopant of arsenic, method for the preparation thereof and method

Details Dopant of arsenic, method for the preparation thereof and method Dopant of arsenic, method for the preparation thereof and method

1989-07-17

1990-05-29

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437141, 437160, 252950, 501154, 423 87, 4273722, H01L 2100, H01L 2102, H01L 21225, H01L 2122

Patent

active

049295721

ABSTRACT:
The dopant body of arsenic for doping of a semiconductor substrate, e.g., silicon wafer, is a sintered body of a powder mixture comprising silicon arsenide, silica and, optionally, arsenic oxide in a specified proportion. The dopant body can be easily prepared and has various advantages over conventional elementary arsenic powder or a shaped body of silicon arsenide alone in respect of the high mechanical strength of the dopant body and absence of the problem of environmental contamination.

REFERENCES:
patent: 3879230 (1975-04-01), Nakamura
patent: 4211821 (1980-07-01), Hadni
patent: 4277525 (1981-07-01), Nakayama et al.
patent: 4430188 (1984-02-01), Cohn
patent: 4525429 (1985-06-01), Raiser et al.
patent: 4526826 (1985-07-01), Ten Eyck et al.
patent: 4798764 (1989-01-01), Tressler et al.

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