Dopant coated bead-like silicon particles

Details Dopant coated bead-like silicon particles Dopant coated bead-like silicon particles

1987-11-27

1988-12-06

Andrews, Melvyn J.

Stock material or miscellaneous articles

Coated or structually defined flake, particle, cell, strand,...

Particulate matter

428641, 428570, 1566204, B32B 100

Patent

active

047895969

ABSTRACT:
Particles of silicon and a p or n carrier substance which are in spherical or spheroidal form, and suitable for use in the preparation of doped semiconductor devices, can be prepared by a fluidized bed technique for chemical vapor deposition of a carrier substance (B, P, As or Sb). The prepared products have a kernel of high purity polysilicon and a layer of silicon/dopant alloy upon the kernel. Optionally, the particles have a thin outer layer of silicon.

REFERENCES:
patent: 3012861 (1961-12-01), Ling
patent: 3480474 (1969-11-01), Emeis et al.
patent: 3708728 (1973-01-01), Sterling et al.
patent: 4249988 (1981-02-01), Lavigna
patent: 4425408 (1984-01-01), Levine et al.

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