Drying and gas or vapor contact with solids – Process – With fluid current conveying or suspension of treated material
Reexamination Certificate
2006-06-27
2006-06-27
Gravini, S. (Department: 3749)
Drying and gas or vapor contact with solids
Process
With fluid current conveying or suspension of treated material
C034S068000
Reexamination Certificate
active
07065900
ABSTRACT:
A substrate transferring/treating system includes a substrate stacking base, a substrate transferring member for receiving/transferring the substrate from/to the base, a substrate cleaning/drying device for cleaning and drying the substrate transferred from the substrate transferring member, and a substrate treating device for treating the substrate that is cleaned and dried by the substrate cleaning/drying device and transferred by the substrate transferring member.
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Kim Kyung-Chul
Lee Sok-Joo
Park Yong-Seok
DMS Co., Ltd.
Gravini S.
Marshall & Gerstein & Borun LLP
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