Docking apparatus

Details Docking apparatus Docking apparatus

1985-03-11

1987-05-12

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, 324 725, 324 73PC, G01R 104, G01R 3102, G01R 1512

Patent

active

046653600

ABSTRACT:
Docking apparatus for a semiconductor wafer prober (16). A cylindrical housing assembly provides an electrical interface between pads on the wafer (22) and contacts on the load board (76) of a test head (12) through a contact ring (74). The housing assembly is in two parts with a first part (29) clamped to a frame portion (30) of the prober and a second part (58) supported above the first part by compression springs (64). Limited angular movement is provided between the housing assembly and the prober frame. The separation between the housing members is maintained so that the force exerted on the contact ring in the docking process is determined by the compression of the springs.

REFERENCES:
patent: 4518914 (1985-05-01), Okubo et al.

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