Dockable interface airlock between process enclosure and interpr

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

414292, 118 50, 29743, B65G 100, B65G 6534, C23C 1400, B23B 2924

Patent

active

054511313

ABSTRACT:
Disclosed is a manufacturing system having isolated islands of "clean room" environment connected by inter-process transfer containers for transfering in-process workpieces. The system has airlock transfer ports between the process enclosures and the inter-process transfer containers. The make and break airlock transfer ports have facing sealable doors in the process enclosure and the transfer container. These doors are in air sealable facing recesses of the process enclosure and the transfer container. At least one peripheral gasket surrounds the recesses and the pair of doors. This provides a substantially clean room environment in the airlock. The sealable door in the interprocess transfer container is fabricated of a ferromagnetic material and is seated on a ferromagnetic gasket, while the sealable door in the process enclosure has a controllable electromagnetic clamp. After establishment of an airtight seal between the two recesses, the doors are opened by activating the electromagnetic clamp in the process enclosure door to pull the ferromagnetic door in the interprocess transfer container away from the ferromagnetic gasket. The results in the simultaneous opening of the of the process enclosure door and the ferromagnetic interprocess transfer container door, while avoiding contamination inside either of the containers.

REFERENCES:
patent: 4343584 (1982-08-01), Hudgins
patent: 4532970 (1985-08-01), Tullis et al.
patent: 4534389 (1985-08-01), Tullis
patent: 4616683 (1986-10-01), Tullis et al.
patent: 4636128 (1987-01-01), Millis et al.
patent: 4674936 (1987-06-01), Bonora
patent: 4674939 (1987-06-01), Maney et al.
patent: 4676709 (1987-06-01), Bonora et al.
patent: 4705444 (1987-11-01), Tullis et al.
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4739882 (1988-04-01), Parikh et al.
patent: 4781511 (1988-11-01), Harada et al.
patent: 4802809 (1989-02-01), Bonor et al.
patent: 4815912 (1989-03-01), Maney et al.
patent: 4851018 (1989-07-01), Lazzari et al.
patent: 4859137 (1989-08-01), Bonora et al.
patent: 4875825 (1989-10-01), Tullis et al.
patent: 4901011 (1990-02-01), Koike et al.
patent: 4917556 (1990-04-01), Stark et al.
patent: 4923353 (1990-05-01), Tullis et al.
patent: 4963069 (1990-10-01), Wurst et al.
patent: 4995430 (1991-02-01), Bonora et al.
patent: 5100276 (1992-03-01), Iwasaki et al.
patent: 5232328 (1993-08-01), Owczarz et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Dockable interface airlock between process enclosure and interpr does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Dockable interface airlock between process enclosure and interpr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dockable interface airlock between process enclosure and interpr will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1824651

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.