DLL circuit taking acount of external load

Details DLL circuit taking acount of external load DLL circuit taking acount of external load

2005-03-01

2005-03-01

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C219S121600, C219S121680

Reexamination Certificate

active

06862490

ABSTRACT:
Apparatus (10) for performing patterned cleaning of substrate surfaces (11) includes substrate (11), energetic beam (12) directed to the substrate (11), material carrier element (14) having a deposition layer (16), and a control unit (8) operating the apparatus (10) in either a “material removal” or a “material transfer” mode in a predetermined sequence. In the “material removal” mode, the following steps are followed which include the material carrier element (14) from the intersection with the energy beam (12) and allowing impinging of the energy beam (12) on the surface of the substrate in a predetermined patterned fashion so that the material of the substrate is disintegrated at predetermined locations of the substrate surface (11). After the first cleaning, the control unit (18) changes the mode of the operation to the “material transfer” by moving the material carrier element (14) into position intersecting with the energy beam (12) so that the material of the deposition layer (16) is deposited on the surface of the substrate (11).

REFERENCES:
patent: 5319183 (1994-06-01), Hosoya et al.
patent: 5389196 (1995-02-01), Bloomstein et al.
patent: 5643472 (1997-07-01), Engelsberg et al.
patent: 6025110 (2000-02-01), Nowak
patent: 6583381 (2003-06-01), Duignan
patent: 6649861 (2003-11-01), Duignan

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