DLC film and method for forming the same

Details DLC film and method for forming the same DLC film and method for forming the same

2005-07-06

2008-12-16

Choi, William C (Department: 2873)

Optical: systems and elements

Lens

With graded refractive index

C359S652000

Reexamination Certificate

active

07466491

ABSTRACT:
The present invention provides a DLC film that functions as an optical element and that can easily be miniaturized or integrated, and a method for forming the DLC film. A DLC film that has a refractive index varying continuously in at least one width direction from the center O of the DLC film. More specifically, a DLC film in which the refractive index decreases continuously in at least one width direction from the center O of the DLC film, and thereby the DLC film functions as a convex lens. A DLC film in which the refractive index increases continuously in at least one width direction from the center of the DLC film, and thereby the DLC film functions as a concave lens. A DLC film that has a refractive index varying continuously in the thickness direction. In addition, a method for forming a DLC film, including irradiating the DLC film with an energy beam to change the refractive index of the DLC film continuously in at least one width direction from the center of the DLC film and/or the thickness direction.

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