Distributed-mass micromachined gyroscopes operated with...

Details Distributed-mass micromachined gyroscopes operated with... Distributed-mass micromachined gyroscopes operated with...

2006-09-05

2006-09-05

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504120

Reexamination Certificate

active

07100446

ABSTRACT:
A micromachined z-axis rate gyroscope with multidirectional drive-mode has an increased drive-mode bandwidth for relaxing mode-matching requirement in which the drive and sense modes are completely decoupled. By utilizing multiple drive-mode oscillators with incrementally spaced resonance frequencies, wide-bandwidth response is achieved in the drive-mode, leading to reduced sensitivity to structural and thermal parameter fluctuations. Quadrature error and zero-rate-output are also minimized, due to the enhanced decoupling of multi-directional linear drive-mode and the torsional sense-mode. Bulk-micromachined prototypes have been fabricated in a one-mask SOI-based process, and is experimentally characterized.

REFERENCES:
patent: 5889207 (1999-03-01), Lutz
patent: 6244111 (2001-06-01), Funk
patent: 6349597 (2002-02-01), Folkmer et al.
patent: 6823733 (2004-11-01), Ichinose
patent: 6859113 (2005-02-01), Giousouf et al.

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