Distributed feedback semiconductor laser equipment employing...

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction

Reexamination Certificate

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C257S098000, C372S050121, C372S103000

Reexamination Certificate

active

06989550

ABSTRACT:
The prior art distributed feedback laser having an InGaAlAs active layer involves a problem that its laser characteristics are deteriorated at high temperature due to the high device resistance. According to the present invention, a ridge type laser is fabricated by: forming an InGaAlAs-MQW layer104on a n-type InP substrate101; growing a p-type InGaAlAs-GRIN-SCH layer105, a p-type InAlAs electron stopping layer106and a p-type grating layer107in this order on the InGaAlAs-MQW layer104; forming a grating; and regrowing a p-type InP cladding layer108and a p-type InGaAs contact layer in this order. The concave depth of the grating is smaller than the thickness of the p-type grating layer107.

REFERENCES:
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patent: 2002/0131466 (2002-09-01), Salvatore et al.
patent: 11-054837 (1999-02-01), None
Itaya et al., “New 1.5 micron Wavelength GalnAsP/InP Distributed Feedback Laser”, Electronics Letter, vol. 18, No. 23, Nov. 1982, pp. 1006-1008.
Murai, H. et al.; “Lasing characteristics under high temperature operation of 1.55 μm strained InGaAsP/InGaAIAs MQW laser with InAIAs electron stopper layer”, Electronics Letters, vol. 31, Issue 24, Nov. 23, 1995 pp 2105-2107.
IEEE Journal of Quantum Electronics, vol. 30, No. 2, Feb. 1994, pp. 511-521.
10th International Conference on Indium Phosphide and Related Materials, 1998, ThP55, pp. 729-732.
2001 Autumn Japan Society of Applied Physics Annual Meeting Proceedings, 13p-B-16, p. 869.
Optical Fiber Communication Conference 2002, Technical Digest ThF3, pp. 417-418.

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