Distributed feedback laser diode comprising an active layer part

Coherent light generators – Particular active media – Semiconductor

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372 46, 372 96, 372102, H01S 319

Patent

active

047992263

ABSTRACT:
In a distributed feedback laser diode comprising an optical waveguide layer, a first stack of a current confining and a current blocking layer, and a second stack of a first cladding layer, an active layer, and a second cladding layer consecutively on a semiconductor substrate having a corrugated surface, a pair of inwardly directed surfaces is formed to define a groove in the first stack, to divide the current blocking layer into two current blocking parts, and to expose an area of the waveguide layer as a groove bottom. The first cladding layer is formed on the current blocking parts, the inwardly directed surfaces, and the groove bottom. The laser diode is suitable to manufacture by metal organic chemical vapor deposition. The groove is preferably perpendicular to corrugations of the corrugated surface. The groove bottom may have a width of 1.5 microns. The groove can be formed by chemical etching of the first stack before epitaxial growth of the first cladding layer.

REFERENCES:
patent: 4667332 (1987-05-01), Mihashi et al.

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