Distributed feedback-channeled substrate planar semiconductor la

Coherent light generators – Particular resonant cavity – Distributed feedback

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372 50, H01S 308

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active

052951502

ABSTRACT:
A distributed feedback semiconductor diode laser includes a substrate of n-type gallium arsenide having a channel along one surface thereof. A first clad layer of n-type aluminum gallium arsenide is on the surface of the substrate. The first clad layer fills the channel and has a planar surface. An active layer of undoped aluminum gallium arsenide is on the first clad layer and a first spacer layer of p-type conductivity aluminum gallium arsenide is on the active layer. A grating layer of p-type conductivity aluminum gallium arsenide is on the first spacer layer and has a second order grating therein which extends across the channel in the substrate. A second spacer layer of p-type conductivity aluminum gallium arsenide is on the grating layer and a second clad layer of p-type conductivity aluminum gallium arsenide is on the second spacer layer. The content of aluminum in the second clad layer varies across its thickness from an amount less than that in the second spacer layer at its junction with the second spacer layer to an amount equal to that in the second spacer layer. A cap layer of n-type conductivity gallium arsenide is on the second clad layer and a p-type conductivity contact region extends through the cap layer to the second clad layer over the groove in the substrate. Conductive contacts are on the contact region and a second surface of the substrate. The composition and thicknesses of the active layer, spacer layers and grating layer are such as to provide the output beam of the diode laser with a relatively low divergence angle of about 27.degree..

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patent: 5131002 (1992-07-01), Mooradian
A. Takemoto et al "1.3-.mu.m Distributed Feedback Laser Diode with a Grating Accurately Controlled by a New Fabrication Technique", published in Journal of Lightwave Technology, vol. 7, No. 12, Dec. 1989 pp. 2072-2076.
N. Yoshida et al., "InGaAsP/InP DFB Laser with a New Grating Structure by MOCVD", published in Proceedings of International Electron Devices Meeting of Dec., 1988 pp. 307-310.
B. Goldstein et al., "Efficient AlGaAs channeled-planar distributed feedback laser", published in Applied Physics Letters, vol. 53 (7), Aug. 15, 1988, pp. 550-552.
S. Takigawa et al. "Continuous room-temperature operation of a 75a9-nm GaAlAs distributed feedback laser", published in Applied Physics Letters, vol. 51 (20), Nov. 16, 1987, pp. 1580-1581.

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