Optical: systems and elements – Light interference – Produced by coating or lamina
Reexamination Certificate
2006-10-03
2006-10-03
Dunn, Drew A. (Department: 2872)
Optical: systems and elements
Light interference
Produced by coating or lamina
C359S359000, C359S585000
Reexamination Certificate
active
07116483
ABSTRACT:
A distributed Bragg reflector and a method of fabricating the same incorporates a support for supporting the gaps against collapse. The method includes forming a plurality of alternating structure and sacrificial layers on a substrate. The structure and sacrificial layers are etched into at least one mesa protruding from the substrate. A support layer is formed on the at least one mesa leaving a portion of the structure and sacrificial layers exposed. At least a portion of at least one of the exposed sacrificial layers are etched from between the structure layers to form gaps between the structure layers.
REFERENCES:
patent: 6324192 (2001-11-01), Tayebati
patent: 6751395 (2004-06-01), Novotny et al.
Corzine Scott W.
Leary Michael H.
Lin Chao Kun
Renne Ty Tan Michael
Zhu Jintian
Avago Technologies Fiber (IP) Singapore Pte. Ltd.
Dunn Drew A.
Pritchett Joshua L.
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