Optical: systems and elements – Light interference – Produced by coating or lamina
Reexamination Certificate
2005-09-20
2005-09-20
Dunn, Drew A. (Department: 2872)
Optical: systems and elements
Light interference
Produced by coating or lamina
C359S359000, C359S585000
Reexamination Certificate
active
06947217
ABSTRACT:
A distributed Bragg reflector and a method of fabricating the same incorporates a support for supporting the gaps against collapse. The method includes forming a plurality of alternating structure and sacrificial layers on a substrate. The structure and sacrificial layers are etched into at least one mesa protruding from the substrate. A support layer is formed on the at least one mesa leaving a portion of the structure and sacrificial layers exposed. At least a portion of at least one of the exposed sacrificial layers are etched from between the structure layers to form gaps between the structure layers.
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Corzine Scott W.
Leary Michael H.
Lin Chao Kun
Renne Ty Tan Michael
Zhu Jintian
Dunn Drew A.
Pritchett Joshua L
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