Distortionless x-ray inspection

Details Distortionless x-ray inspection Distortionless x-ray inspection

1994-06-30

1996-10-29

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Absorption

378 57, 378208, G01N 2304

Patent

active

055704077

ABSTRACT:
The cavities of IC's are inspected for contaminants rising a point source x-ray. The IC's are arranged on a curved surface, approximating the arc formed by the radiation from the point source x-ray. In this way, the IC's may be stood on end with the sides parallel to the x-ray radiation. In this arrangement, the radiation from the x-ray point source passes approximately parallel to the IC size and a clear image of the cavity is achieved without distortion produced by the x-rays passing thou the bottom or the top. Alternately, the curved surface for mounting the IC's may be formed of small straight sections formed at angles approximating the curve.

REFERENCES:
patent: 2356358 (1944-08-01), Schneeman
patent: 4872187 (1989-10-01), Nakahata et al.

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