Distillation: processes – separatory – With disparate physical separation – Of entrained particles from a vapor or gas
Patent
1988-08-12
1990-12-25
Bascomb, Wilbur
Distillation: processes, separatory
With disparate physical separation
Of entrained particles from a vapor or gas
203 12, 203 77, 203 80, 203 86, 203DIG2, 203DIG9, 134 12, 156642, 159 473, 159DIG15, 159DIG19, 202154, 202159, 2021856, 202197, 202205, 2022671, 423531, B01D 310, C01B 1790
Patent
active
049800329
ABSTRACT:
An apparatus and method for reprocessing waste piranha containing contaminated H.sub.2 SO.sub.4 from, for example, a semiconductor processing operation is described. The apparatus and method include a first distillation flask which are maintained under a substantial vacuum. The first distillation flask includes a first column with a column packing means and a reflux means to retard loss of H.sub.2 SO.sub.4 in the first distillation. The second distillation flask boils off substantially pure H.sub.2 SO.sub.4 through a column which is coupled to a condenser which condenses substantially pure H.sub.2 SO.sub.4.
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Dobson Jesse C.
McCormick Marshall
Alameda Instruments, Inc.
Bascomb Wilbur
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