Distance measuring device based on laser interference with a baf

Details Distance measuring device based on laser interference with a baf Distance measuring device based on laser interference with a baf

1997-11-17

1999-02-23

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

G01B 902

Patent

active

058750312

ABSTRACT:
A distance measuring device based on laser interference reduces measurement errors caused by irregular air currents and the like on the measurement optical path, and realizes a high throughput and a high integration degree. The distance measuring device based on laser interference according to this invention includes a baffle structure member for causing a gas on the measurement optical path to flow as a laminar flow in a predetermined direction.

REFERENCES:
patent: 4278352 (1981-07-01), Keller
patent: 5469260 (1995-11-01), Takagi et al.
patent: 5550633 (1996-08-01), Kamiya
patent: 5552888 (1996-09-01), Sogand et al.
Koten Butsuri-Gaku Mar. 1975 (w/English Abstract).
HP Laser Interferometry, Section II, pp. 2-1 to 2-8, HP5527A.

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