Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1988-05-31
1989-12-12
Willis, Davis L.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356358, G01B 902
Patent
active
048863653
ABSTRACT:
A device for measuring the distance between the device and a measuring surface, with an optical interferometer, which has a measuring wave guide, one end of which is connected with a laser and the other of which is directed to optical measuring reflector which is positioned on the measuring surface or is connected with the same in an effective manner, which reflects the light back into the measuring wave guide. The interferometer furthermore has a reference wave guide which is coupled with the measuring wave guide at a coupling point, has a mirror on its one end, and on its other end, a photoelectrical converter, which is connected with an indicator device for indicating the electrical output signal of the photoelectrical converter. The reference wave guide is coupled, preferably by means of a polarizing beam splitter, with a branch wave guide, the end of which is connected with an additional photoelectrical converter. The reference wave guide has a phase adjustment device. The outputs of the photoelectrical converter are connected with a differential amplifier, the output signal of which is free from direct current and, is fed into the indicator device. Because the output signal of the differential is free from direct current, the further processing of the interference output signal is facilitated and the measuring precision is increased.
REFERENCES:
patent: 4360271 (1982-11-01), Downs et al.
patent: 4717255 (1988-01-01), Ulbers
patent: 4744661 (1988-05-01), Ulbers et al.
Hommelwerke GmbH
Koren Matthew W.
Willis Davis L.
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