Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Patent
1993-07-20
1995-04-25
Wieder, Kenneth A.
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
324 711, 324663, 204434, 205 81, 427 8, G01R 2500, G01N 1700
Patent
active
054102561
ABSTRACT:
A dissipation factor measurement is used to predict as-anodized fixture performance prior to actual use of the fixture in an etching environment. A dissipation factor measurement of the anodic coating determines its dielectric characteristics and correlates to the performance of the anodic coating in actual use. The ability to predict the performance of the fixture and its anodized coating permits the fixture to be repaired or replaced prior to complete failure.
REFERENCES:
patent: 3230449 (1966-01-01), Kaiser
patent: 3458803 (1969-07-01), Maguire
patent: 3866117 (1975-02-01), Erdman
patent: 3975681 (1976-08-01), Angelini et al.
patent: 5243298 (1993-09-01), Runner
Do Diep
Kidd William W.
Sematech Inc.
Wieder Kenneth A.
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