Dissimilar superimposed grating precision alignment and gap meas

Details Dissimilar superimposed grating precision alignment and gap meas Dissimilar superimposed grating precision alignment and gap meas

1984-03-16

1986-06-24

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With birefringent element

356356, G01B 902

Patent

active

045964670

ABSTRACT:
A substrate having a diffraction grating of a first periodicity formed thereon, a mask having a diffraction grating of a second periodicity formed thereon, the mask and substrate being positioned such that the respective mask and substrate gratings are generally parallel opposing one another on the mask and substrate, means for providing collimated coherent light directed so as to impinge on the mask and substrate gratings, and means for separately collecting, recombining, and detecting the intensity of at least a first given order of diffracted light beams as respectively diffracted by the mask and substrate gratings.

REFERENCES:
patent: 4200395 (1980-04-01), Smith et al.
patent: 4251160 (1981-02-01), Bouwhuis et al.
patent: 4265542 (1981-05-01), Snow
patent: 4340305 (1982-07-01), Smith et al.
patent: 4402610 (1983-09-01), Lacombat
Applied Physics Letter Oct. 1977, Flanders et al.
IBM Technical Disclosure Bulletin Dec. 1980, vol. 23, No. 7A.

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