Disposable hard mask for memory bitline scaling

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Making plural separate devices

Reexamination Certificate

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C438S258000

Reexamination Certificate

active

07018868

ABSTRACT:
The invention is a semiconductor device and a method of manufacturing the semiconductor device. The semiconductor device includes buried bitlines in a semiconductor substrate. Additionally, doped regions are formed adjacent the buried bitlines. The doped regions adjacent the buried bitlines inhibit a leakage current between the buried bitlines.

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Claims from U.S. Appl. No. 10/770,673, filed Feb. 2, 2004.

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