Disposable hard mask for forming bit lines

Details Disposable hard mask for forming bit lines Disposable hard mask for forming bit lines

2008-03-11

2008-03-11

Fourson, George R. (Department: 2823)

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

C438S585000, C438S706000

Reexamination Certificate

active

11100563

ABSTRACT:
A method includes forming a group of disposable hard mask structures on a semiconductor device that includes a group of memory cells. The method further includes using the disposable hard mask structures to precisely control a junction profile of the memory cells.

REFERENCES:
patent: 5753557 (1998-05-01), Tseng
patent: 6171940 (2001-01-01), Huang
patent: 6576562 (2003-06-01), Ohuchi et al.
patent: 6605541 (2003-08-01), Yu
patent: 6607955 (2003-08-01), Lee
patent: 6620741 (2003-09-01), Gracias et al.
patent: 6764903 (2004-07-01), Chan et al.
patent: 6797565 (2004-09-01), Yang et al.
patent: 6864556 (2005-03-01), You et al.
patent: 6927145 (2005-08-01), Yang et al.
patent: 7037850 (2006-05-01), Lee et al.
patent: 2002/0086547 (2002-07-01), Mui et al.
patent: 2003/0096503 (2003-05-01), Cho et al.
patent: 2004/0005778 (2004-01-01), Kronke et al.
patent: 2004/0058518 (2004-03-01), Fang et al.
patent: 2005/0136630 (2005-06-01), Kim
patent: 2005/0212035 (2005-09-01), Utsuno et al.
patent: 2006/0030151 (2006-02-01), Ding et al.
patent: 2006/0154477 (2006-07-01), Geng et al.
patent: 2006/0264002 (2006-11-01), Tran et al.
patent: 101 10 150 (2002-09-01), None
patent: 1 170 800 (2002-01-01), None
2002 IEEE International Solid-State Circuits Conference, Session 6, “SRAM and Non-Volatile Memories,” Feb. 4, 2004,6pages.
2002 IEEE International Solid-State Circuits Conference, 29 pages.

Affiliated with

Also associated with

Rating

Disposable hard mask for forming bit lines does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Disposable hard mask for forming bit lines, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Disposable hard mask for forming bit lines will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3941303