Display device with silicon-containing adhesion layer

Details Display device with silicon-containing adhesion layer Display device with silicon-containing adhesion layer

1999-11-01

2000-10-24

Patel, Nimeshkumar D.

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

313351, 313336, 313495, 313497, H01J 102

Patent

active

061372145

ABSTRACT:
A field emission device having a gate electrode structure in which a nanocrystalline or microcrystalline silicon layer is positioned over a silicon dioxide dielectric layer. Also disclosed are methods for forming the field emission device. The nanocrystalline or microcrystalline silicon layer forms a bond with the dielectric layer that is sufficiently strong to prevent delamination during a chemical-mechanical planarization operation that is conducted during formation of the field emission device. The nanocrystalline or microcrystalline silicon layer is deposited by PECVD in an atmosphere that contains silane and hydrogen at a ratio in a range from about 1:15 to about 1:40. Multiple field emission devices may be formed and included in a flat panel display for computer monitors, telecommunications devices, and the like.

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