Displacement sensor with an excitation coil and a detection...

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – By loading of specimen

Reexamination Certificate

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C073S001790, C324S207120

Reexamination Certificate

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11178564

ABSTRACT:
To be able to detect a displacement amount of a moving object by a resolution of from micrometer to nanometer by a simple structure.An excitation coil23and a detection coil25are arranged to align and a magnetic body probe27in a conical shape a sectional area of which is change in a longitudinal direction is arranged in a state of being inserted into an air core portion of the excitation coil23. An output terminal from the detection coil25is connected to an amplifier33and a phase shifting circuit35is provided between the amplifier33and an input terminal of the excitation coil23. When the probe27of the magnetic body is moved at inside of the air core portion of the excitation coil23, inductance of the excitation coil23is changed, a phase difference is produced between an input signal inputted to the excitation coil23and an output signal outputted from the detection coil25and the phase shifting circuit35changes a frequency to nullify the phase difference. The displacement amount is detected from the frequency deviation at this occasion.

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