Displacement sensor

Details Displacement sensor Displacement sensor

2010-02-25

2011-10-18

Ton, Tri T (Department: 2877)

Optics: measuring and testing

Position or displacement

C356S622000

Reexamination Certificate

active

08040529

ABSTRACT:
A focused image is taken around the focal point by a confocal displacement meter. In a measurement apparatus, a confocal displacement meter system OPT-A includes a laser diode1, a collimator lens4, an objective lens6, a half mirror3, a diaphragm plate31, and a photodiode2. An observation image imaging system OPT-B is a telecentric light receiving optical system, and the observation image imaging system OPT-B includes a white light source94, an objective lens6, a dichroic mirror5, a diaphragm plate81, an image formation lens82, and an image sensor9. The collimator lens4is swept by an oscillator7in a two-headed arrow direction. A diameter of a diaphragm hole of the diaphragm plate81is set such that a depth of field of the objective lens6is not lower than sweep amplitude of the collimator lens4.

REFERENCES:
patent: 3513817 (2004-01-01), None

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