Displacement measuring method and apparatus using plural light b

Details Displacement measuring method and apparatus using plural light b Displacement measuring method and apparatus using plural light b

1997-11-03

1998-10-06

Kim, Robert

Optics: measuring and testing

By particle light scattering

With photocell detection

356363, 356358, G01B 902

Patent

active

058185887

ABSTRACT:
A displacement measuring method for measuring displacement of an object to be examined is disclosed, wherein light which contains two components having a small difference in frequency is separated into a first light of a firs wavelength and a second light of a second wavelength, having different frequencies. First light beam of the first light and a second light beam of the second light interfere with each other, wherein at least one of the first and second light beams is directed via the object, whereby a first light beat signal is produced. Third light beam of the first light and a fourth light beam of the second light interfere with each other, wherein at least one of the third and fourth light beams is directed via the object, whereby a second light beat signal having a predetermined phase difference as compared with the first light beat signal is produced. Then, displacement of the object is measured on the basis of a phase resulting from comparison of the phases of the first and second light beat signals.

REFERENCES:
patent: 3790284 (1974-02-01), Baldwin
patent: 4912530 (1990-03-01), Bessho
patent: 5204535 (1993-04-01), Mizutani
patent: 5321502 (1994-06-01), Matsumoto et al.

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