Displacement measuring method and apparatus using interference o

Details Displacement measuring method and apparatus using interference o Displacement measuring method and apparatus using interference o

1998-09-18

2000-06-06

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356349, 356359, G01B 902

Patent

active

060725826

ABSTRACT:
A displacement measuring method and apparatus divides incident light into two beams. One beam is reflected by a surface to be measured, and another beam is reflected by a reference surface. The image of interference fringes composed of light reflected by the surface to be measured and light reflected by the reference surface is obtained as a monochromatic-light image and a chromatic-light image which are simultaneously photographed. The position of a zero-order interference fringe is detected based on the maximum brightness position of the chromatic-light image, and the displacement of a point to be measured is found based on the position of a interference fringe in the monochromatic-light image which corresponds to that point, and a position in the monochromatic-light image corresponding to the zero-order interference fringe.

REFERENCES:
patent: 5486924 (1996-01-01), Lacey

Affiliated with

Also associated with

Rating

Displacement measuring method and apparatus using interference o does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Displacement measuring method and apparatus using interference o, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Displacement measuring method and apparatus using interference o will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2218352