Displacement measuring apparatus and method

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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G01B 0902

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046360760

ABSTRACT:
Apparatus for measuring displacement comprises a member, such as a reading head, which carries a stepped index diffraction grating (14) and is movable with respect to a reflective scale grating (16). The head also carries a source (10) and lens for directing light on to the index grating and then on to the scale grating for reflection to the index grating, with the resultant Moire bands detected by a photodetector (18) on the reading head. In order to determine the phase separation or offset, and to avoid high sensitivity thereof to the spacing between the gratings, the index grating (14) has a square-stepped profile resulting in graded, increasing thickness. Alternatively, a conventional index grating may be employed in conjunction with a stepped profile optical element interposed between the two gratings.

REFERENCES:
Rassudova et al., "Miniature Sensor of Linear Displacements", Sov. J. Opt. Technol., vol. 43, No. 4, pp. 235-237, Apr. 1976.
USSR Inventor's Certificate No. 1,093,889.
G. S. Landsberg "Optics", Moscow, 1954, pp. 167-169 .sctn.50, Michelson's Echelon.
Optics & Spectroscopy, vol. 14, 1963, pp. 215-219, Rassudova and Gerasimov, Use of Reflecting Diffraction Gratings in Interference Systems for Measuring Linear Shifts.

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