Displacement measuring apparatus and method

Details Displacement measuring apparatus and method Displacement measuring apparatus and method

1985-05-20

1988-10-11

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

G01B 902

Patent

active

047767014

ABSTRACT:
Displacement measuring apparatus comprises a light source (10), a lens (12), and index grating (14), a reflective scale grating (16), and three photodetectors (18) at positions corresponding to the zero order and positive and negative first order images of the source (10). The index grating (14) has a castellated surface profile with a mark/space ratio (a/b, FIG. 3) and a castellation height (h, FIG. 3) chosen so that the three photodetectors (18) see wavefronts having a phase separation of 120. The electrical signals from the photodetectors (18) are used to sense the magnitude and direction of movement of a reading head carrying the components (10, 12, 14 and 18) with respect to the scale grating (16).

REFERENCES:
patent: 4176276 (1979-11-01), Kaul et al.
patent: 4576850 (1986-03-01), Martens
"The Use of Reflection Diffraction Gratings in Interference Systems for Measuring Linear Shifts, II" from aus Zeitschrift, "Opt. Spectrose. 14, 215 (1963) S. 295-300, pp. 295-297.

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