Displacement measuring apparatus

Details Displacement measuring apparatus Displacement measuring apparatus

1989-07-14

1990-12-25

McGraw, Vincent P.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, 250237G, 25023116, G01B 902

Patent

active

049798260

ABSTRACT:
A displacement measuring apparatus has an illuminating device for illuminating a diffraction grating with a radiation beam, an optical system for directing first and second diffracted beams created by the diffraction grating with to the diffraction grating, the optical system being provided so that the first and second diffracted beams have a common optical path and travel in opposite directions along the optical path. In addition, a device receives an interference beam formed by first and second re-diffracted beams created by the first and second diffracted beams being diffracted by the diffraction grating, and outputs a signal conforming to the displacement of the diffraction grating relative to the radiation beam.

REFERENCES:
patent: 4676645 (1987-06-01), Taniguchi et al.
patent: 4728193 (1988-03-01), Bantelt et al.

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