Displacement measuring apparatus

Details Displacement measuring apparatus Displacement measuring apparatus

1999-04-06

2000-10-03

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356345, 356346, G01B 902

Patent

active

061280836

ABSTRACT:
The displacement measuring apparatus of a laser interference technology includes a probe 3 which delivers at a photodetector 17 an RF signal of which a modulated component proportional to a displacement of an object 2 under measurement. The apparatus has also a phase-demodulation circuit 9 in which an interference signal produced by shifting the frequency of the RF signal to an intermediate frequency is phase-demodulated on the basis of the carrier signal for supply to a light modulator 16. Thus the apparatus can detect a displacement of the object with a high resolution.

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