Displacement information measuring apparatus in which a light-re

Details Displacement information measuring apparatus in which a light-re Displacement information measuring apparatus in which a light-re

1995-09-07

1998-09-29

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356 285, G01B 902

Patent

active

058152679

ABSTRACT:
An apparatus for measuring displacement information of a target object includes an illumination system, a photodetector, and an adjusting member. The illumination system causes a beam from a light source to be incident on the target object. The photodetector receives and detects light from the target object upon incidence of the beam from the illumination system on the target object. The displacement information of the target object is measured upon detection of the light by the photodetector. The adjusting member changes a light-receiving state of the light on the photodetector.

REFERENCES:
patent: 3856401 (1974-12-01), Heitmann et al.
patent: 5101112 (1992-03-01), Amari
patent: 5327222 (1994-07-01), Takamiya et al.

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