Displacement information measuring apparatus

Optics: measuring and testing – Velocity or velocity/height measuring – With light detector

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356356, G01P 0336

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active

057370702

ABSTRACT:
An apparatus for measuring information about displacement of an object includes a light source having the wavelength of its emitted light beam varied by a temperature change, a diffraction grating for diffracting the light beam from the light source, an optical system having first and second lens systems for deflecting the diffracted light beam from the diffraction grating and applying it to the object, a photodetector for detecting scattered light subjected to a Doppler shift from the object to which the diffracted light beam is applied, the information about the displacement of the object being measured based on a Doppler signal obtained by detection of the scattered light by the photodetector, and a mounting mechanism for restricting the positional relation between the first and second lens systems, the mounting mechanism varying the spacing between the first and second lens systems by a temperature change. The coefficient of thermal expansion of some member of the mounting mechanism is set so that a variation in the spacing between the first and second lens systems caused by a temperature change may substantially offset a variation in the Doppler signal attributable to the wavelength of the emitted light beam from the light source varied with the same temperature change.

REFERENCES:
patent: 5216478 (1993-06-01), Kadowaki et al.
patent: 5327222 (1994-07-01), Takamiya et al.
patent: 5502466 (1996-03-01), Kato et al.
patent: 5629793 (1997-05-01), Takamiya et al.
patent: 5640239 (1997-06-01), Takamiya et al.

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