Displacement information detection apparatus, scale used in the

Details Displacement information detection apparatus, scale used in the Displacement information detection apparatus, scale used in the

1996-02-15

1997-09-02

Font, Frank

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

250237G, G61B 902

Patent

active

056637942

ABSTRACT:
An apparatus for detecting displacement information is disclosed. The apparatus is provided with a scale arranged on the side of an object of which relative displacement information is to be detected, a periodic signal generation diffraction grating formed at a predetermined pitch, and a predetermined data recording portion formed independently of the periodic signal generation and diffraction grating for detecting displacement information, a first detection system for irradiating a light beam onto the periodic signal generation diffraction grating to generate diffracted light, the first detection system forming a periodic signal corresponding to a displacement relative to the scale by detecting interference light of the diffracted light generated by the periodic signal generation diffraction grating, and a second detection system for optically detecting the predetermined data recording portion. The predetermined data recording portion also has a diffraction grating.

REFERENCES:
patent: 5283434 (1994-02-01), Ishizuka et al.
patent: 5390022 (1995-02-01), Ishizuka et al.
patent: 5448358 (1995-09-01), Ishizuka et al.
patent: 5481106 (1996-01-01), Nyui et al.
patent: 5483377 (1996-01-01), Kaneda et al.
patent: 5498870 (1996-03-01), Ishizuka

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