Optics: measuring and testing – Position or displacement
Reexamination Certificate
2007-07-10
2007-07-10
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Position or displacement
Reexamination Certificate
active
10804183
ABSTRACT:
A displacement gauge comprises an objective lens15that projects light onto a measurement subject16, an exciting portion that vibrates the objective lens15at a preset amplitude along an optical axis direction of light passing through the objective lens15, a position detector for detecting the position of the objective lens15, an objective lens scan portion52for scanning the objective lens15along a plane orthogonal to the optical axis direction, an objective lens movement detecting portion53for detecting the moved position of the objective lens15, an operation processing portion58for calculating a distribution of displacement amount within a measuring area, based on the positional information of the objective lens15within the measuring area detected by the objective lens movement detecting portion53, and the displacement amounts measured at plural measuring points, and an output portion66for outputting the result of calculation by the operation processing portion58.
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Akanbi Isiaka O.
Chowdhury Tarifur
Keyence Corporation
Smith Patent Office
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