Displacement detector

Details Displacement detector Displacement detector

2005-12-20

2008-07-01

Connolly, Patrick (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S521000, C250S23700G

Reexamination Certificate

active

07394550

ABSTRACT:
The displacement detector includes: a light source140; a beam splitter170for dividing the light, which is sent from the light source140, into two beams of light; reflection mirrors181, 182provided for the two beams of light sent from the beam splitter170, for reflecting these two beams of light and making them incident upon a scale110; and corner cubes191, 192provided for the beams of diffracted light, which are generated when two beams of light incident upon the scale110are diffracted by the diffraction grating111, wherein the corner cubes191, 192retroreflect the diffracted light and make the light incident upon the scale as retroreflected light. The incident angle to grating groove formed between the incident light and the normal line vector of the scale is larger than the diffraction angle formed between the retroreflected light and the normal line vector of the scale.

REFERENCES:
patent: 5000542 (1991-03-01), Nishimura et al.
patent: 5066130 (1991-11-01), Tsukiji et al.
patent: 5104225 (1992-04-01), Masreliez
patent: 5146085 (1992-09-01), Ishizuka et al.
patent: 5517307 (1996-05-01), Buehring et al.
patent: 6744520 (2004-06-01), Chang et al.
patent: 6771377 (2004-08-01), Jones et al.
patent: 7187451 (2007-03-01), Kao et al.
patent: 0311144 (1989-04-01), None
patent: 0620418 (1994-10-01), None
patent: 1359389 (2003-11-01), None
patent: 04-270920 (1992-09-01), None

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