Displacement detection apparatus, polarization beam...

Details Displacement detection apparatus, polarization beam... Displacement detection apparatus, polarization beam...

2007-02-19

2010-06-15

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

C356S499000

Reexamination Certificate

active

07738112

ABSTRACT:
A displacement detection apparatus, polarization beam splitter, and diffraction grating are provided. A displacement detection apparatus configured to detect a displacement includes a light source, a reflective diffraction grating configured to receive the two polarized beams, two polarization altering elements configured to alter the polarization states of two diffracted beams of the two polarized beams obtained at the diffraction grating, two mirrors configured to reflect the beams whose polarization states have been altered at the two polarization altering elements and to guide the reflected beams to the two polarization altering elements, each of the mirrors corresponding to the polarization altering elements, and a polarization beam splitter provided as a unit with at least the two polarization altering elements, the polarization beam splitter including a polarizing and splitting surface and a transmissive area.

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