Displacement detection apparatus and drive control apparatus usi

Details Displacement detection apparatus and drive control apparatus usi Displacement detection apparatus and drive control apparatus usi

1996-02-21

1999-09-21

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356354, 250237G, G01B 902

Patent

active

059561408

ABSTRACT:
An apparatus for obtaining displacement information relative to a member includes a light source for illuminating a phase type diffraction grating on the member, an amplitude grating arranged at the position where interference fringes are generated immediately after emerging of diffracted light from the phase type diffraction grating illuminated by the light source, and a light-receiving element for receiving light emerging from the amplitude grating. The light-receiving element generates a periodic signal as displacement information upon relative movement of the member.

REFERENCES:
patent: 5283434 (1994-02-01), Ishizuka et al.
patent: 5390022 (1995-02-01), Ishizuka et al.
patent: 5448358 (1995-09-01), Ishizuka et al.
patent: 5481106 (1996-01-01), Nyui et al.
patent: 5483377 (1996-01-01), Kaneda et al.
patent: 5498870 (1996-03-01), Ishizuka
patent: 5569913 (1996-10-01), Ishizuka et al.

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