Optical: systems and elements – Diffraction – From grating
Patent
1993-12-20
1996-01-09
Lerner, Martin
Optical: systems and elements
Diffraction
From grating
250237G, 359571, G02B 518, G02B 2744, H01J 314, H01J 4014
Patent
active
054833779
ABSTRACT:
A displacement detection apparatus comprises a light source 1, a first diffraction grating including a blazed grating for diffracting and splitting light from the light source to irradiate a 0-order diffraction light and a +1-order diffraction light to a second diffraction grating, a third diffraction grating including a blazed grating for combining a +1-order reflected diffraction light produced by the reflection and diffraction of the 0-order diffraction light by the second diffraction grating and a -1-order reflected diffraction light produced by the diffraction of the +1-order diffraction light by the second diffraction grating to produce an interference light, and a photo-sensing element for converting the interference light to a signal representing a change in the second diffraction grating.
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Ishii Satoshi
Ishizuka Koh
Kaneda Yasushi
Kondo Hiroshi
Canon Kabushiki Kaisha
Lerner Martin
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