Displacement detection apparatus

Details Displacement detection apparatus Displacement detection apparatus

1993-07-13

1996-06-04

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

356375, 385 14, G01B 1114

Patent

active

055238440

ABSTRACT:
An apparatus for detecting a displacement of an object comprises a light source element for emitting a detection light beam, a reflection member for reflecting the detection light beam from the light source element, the detection light beam being irradiated to the object by the reflection by the reflection member, a photo-sensing element for sensing the detection light beam reflected from the object by a photo-sensing plane thereof to detect an incident position of the detection light beam on the photo-sensing plane, displacement information of the object being determined in accordance with the detection by the photo-sensing element, and a substrate having the light source element, the reflection member and the photo-sensing element arranged thereon.

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patent: 5100220 (1992-03-01), Voegeli
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