Displacement detecting apparatus using graduated linear scale

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems

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369 4414, G01J 120

Patent

active

052471659

ABSTRACT:
A displacement detecting apparatus comprises a non-contacting sensor for detecting a displacement of a measured surface, a linear scale unitarily attached to the non-contacting sensor through a coupling member, a graduation read-out device for reading out a graduation of the linear scale, an actuator for moving the non-contacting sensor and the linear scale, and a servo control circuit for driving the actuator, wherein the linear scale and the non-contacting sensor are moved by the actuator in unison with each other. Thus, the displacement of the measured surface can be detected with high accuracy.

REFERENCES:
patent: 4148587 (1979-04-01), Erdmann et al.
patent: 4492856 (1985-01-01), Kimura

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